01986oam 2200517zu 450 991087247680332120241212215254.0(CKB)1000000000022120(SSID)ssj0000393515(PQKBManifestationID)12138293(PQKBTitleCode)TC0000393515(PQKBWorkID)10364382(PQKB)11588959(EXLCZ)99100000000002212020160829d2003 uy engtxtccrRTP 2003 : 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC[Place of publication not identified]IEEE2003Bibliographic Level Mode of Issuance: Monograph9780780378742 0780378741 SemiconductorsHeat treatmentCongressesRapid thermal processingDefectsCongressesSemiconductor dopingCongressesSemiconductorsCongressesElectrical EngineeringHILCCElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCSemiconductorsHeat treatmentRapid thermal processingDefectsSemiconductor dopingSemiconductorsElectrical EngineeringElectrical & Computer EngineeringEngineering & Applied SciencesGelpey Jeffrey C.IEEE Electron Devices SocietyInternational Conference on Advanced Thermal Processing of SemiconductorsPQKBPROCEEDING9910872476803321RTP 2003 : 11th IEEE International Conference on Advanced Thermal Processing of Semiconductors : September 23-26, 2003, the Westin Francis Marion Hotel, Charleston, SC2504879UNINA