01608oam 2200469zu 450 991087246830332120241212215253.0(CKB)1000000000022104(SSID)ssj0000395980(PQKBManifestationID)12189677(PQKBTitleCode)TC0000395980(PQKBWorkID)10461274(PQKB)11226525(EXLCZ)99100000000002210420160829d2003 uy engtxtccr2003 IEEE/LEOS International Conference on Optical MEMs : 18-21 August, 2003, Waikoloa Beach Marroitt an Outrigger Resort, Waikoloa, Hawaii[Place of publication not identified]IEEE2003Bibliographic Level Mode of Issuance: Monograph9780780378308 078037830X Microelectromechanical systemsCongressesOptical MEMSCongressesElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCMicroelectromechanical systemsOptical MEMSElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.36Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers)International Conference on Optical MEMSPQKBPROCEEDING99108724683033212003 IEEE1945350UNINA