01428oam 2200421zu 450 991087241140332120241212214841.0(CKB)111026746719454(SSID)ssj0000455174(PQKBManifestationID)12192165(PQKBTitleCode)TC0000455174(PQKBWorkID)10399667(PQKB)10601428(NjHacI)99111026746719454(EXLCZ)9911102674671945420160829d1997 uy engur|||||||||||txtccr1997 IEEE/Semi Advanced Semiconductor Manufacturing Conference and Workshop[Place of publication not identified]IEEE19971 online resource (480 pages)Bibliographic Level Mode of Issuance: Monograph9780780340503 0780340507 The ASMC '97 proceedings contain premier papers on the latest advances in semiconductor manufacturing for IC manufacturing professionals. The number of papers presented has been on the incline over the past five years.Process controlCongressesSemiconductor industryCongressesProcess controlSemiconductor industry658.562PQKBBOOK99108724114033211997 IEEE2494649UNINA