01578oam 2200481zu 450 991087240810332120241212214825.0(CKB)111026746704768(SSID)ssj0000558518(PQKBManifestationID)12198047(PQKBTitleCode)TC0000558518(PQKBWorkID)10566155(PQKB)10408758(NjHacI)99111026746704768(EXLCZ)9911102674670476820160829d1992 uy engur|||||||||||txtccrIEEE Micro Electro Mechanical Systems, 1992[Place of publication not identified]IEEE19921 online resource (290 pages)Bibliographic Level Mode of Issuance: Monograph9780780304970 0780304977 Microelectromechanical systemsCongressesRoboticsCongressesMicroelectromechanical systemsRobotics620.4Benecke W.Benecke W(Wolfgang)1232096Petzold H.-C(Hans-Christian)1232097IEEE Robotics and Automation Society.Institute of Electrical and Electronics Engineers.German Section.IEEE Workshop on Micro Electro Mechanical Systems(1992 :Travemünde, Lübeck, Germany)PQKBBOOK9910872408103321IEEE Micro Electro Mechanical Systems, 19922860786UNINA