01703nam 2200565Ia 450 991084142150332120230721033147.01-281-94693-197866119469373-527-62213-63-527-62256-X(CKB)1000000000551372(EBL)3460105(SSID)ssj0000235367(PQKBManifestationID)11176146(PQKBTitleCode)TC0000235367(PQKBWorkID)10260862(PQKB)11121884(MiAaPQ)EBC3460105(OCoLC)264717029(EXLCZ)99100000000055137220080822d2008 uy 0engur|n|---|||||txtccrReliability of MEMS[electronic resource] /edited by Osamu Tabata and Toshiyuki Tsuchiya11th ed.Weinheim Wiley-VCHc20081 online resource (0 p.)Advanced micro & nanosystems ;v.6"Testing of materials and devices".3-527-31494-6 Includes bibliographical references and index.Advanced micro & nanosystems ;v.6.Microelectromechanical systemsReliabilityElectrical engineeringMicroelectromechanical systemsReliability.Electrical engineering.615.7Tsuchiya Toshiyuki1667640Tabata Osamu1956-892953MiAaPQMiAaPQMiAaPQBOOK9910841421503321Reliability of MEMS4027600UNINA