01183oam 2200409zu 450 991084136580332120210803233359.00-470-84608-91-60119-081-6(CKB)111087027145340(SSID)ssj0000072537(PQKBManifestationID)12006781(PQKBTitleCode)TC0000072537(PQKBWorkID)10094806(PQKB)10619253(EXLCZ)9911108702714534020160829d2001 uy engtxtccrMicrosensors, MEMS, and Smart Devices[Place of publication not identified]John Wiley & Sons Incorporated2001Bibliographic Level Mode of Issuance: Monograph0-470-85219-4 0-471-86109-X EngineeringElectronicsEngineeringElectronics621.381Gardner Julian W8963Awadelkarim Osama OVaradan Vijay KPQKBBOOK9910841365803321Microsensors, MEMS, and smart devices1092723UNINA