03782nam 2200601 a 450 991083103670332120170809164651.01-282-34620-297866123462000-470-01794-50-470-06541-9(CKB)1000000000357405(EBL)290997(OCoLC)476048340(SSID)ssj0000138763(PQKBManifestationID)11158392(PQKBTitleCode)TC0000138763(PQKBWorkID)10100704(PQKB)11779710(MiAaPQ)EBC290997(PPN)175354006(EXLCZ)99100000000035740520060918d2007 uy 0engur|n|---|||||txtccrDielectric films for advanced microelectronics[electronic resource] /edited by Mikhail Baklanov, Martin Green, and Karen MaexChichester, England ;Hoboken, NJ John Wiley & Sonsc20071 online resource (510 p.)Wiley series in materials for electronic and optoelectronic applicationsDescription based upon print version of record.0-470-01360-5 Includes bibliographical references and index.Low and ultralow dielectric constant films prepared by plasma-enhanced chemical vapor deposition /A. Grill --Spin-on dielectric materials /Geraud Dubois, Robert D. Miller, Willi Volksen --Positron annihilation spectroscopy /David W. Gidley, Hua-Gen Peng, Richard Vallery --Structure characterization of nanoporous interlevel dielectric thin films with x-ray and neutron radiation /Christopher L. Soles ... [et al.] --Ellipsometric porosimetry /Mikhail R. Baklanov --Mechanical and transport properties of low-k dielectrics /J. L. Plawsky ... [et al.] --Integration of low-k dielectric films in damascene processes /R. J. O. M. Hoofman ... [et al.] --ONO structures and oxynitrides in modern microelectronics : material science, characterization and application /Yakov Roizin, Vladimir Gritsenko --Material engineering of high-k gate dielectrics /Akira Toriumi, Koji Kita --Physical characterization of ultra-thin high-k dielectric /T. Conard, H. Bender, W. Vandervorst --Electrical characterization of advanced gate dielectrics /Robin Degraeve ... [et al.] --Integration issues of high-k gate dielectrics /Yasuo Nara --Anisotropic conductive film (ACF) for advanced microelectronic interconnects /Yi Li, C. P. Wong.The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments madWiley series in materials for electronic and optoelectronic applications.Dielectric filmsMicroelectronicsMaterialsDielectric films.MicroelectronicsMaterials.621.381Baklanov Mikhail1628643Green Martin151860Maex Karen1628644MiAaPQMiAaPQMiAaPQBOOK9910831036703321Dielectric films for advanced microelectronics3965886UNINA