01278nam 2200421 450 991083099380332120230809233528.03-527-69483-83-527-69481-13-527-69482-X(CKB)4330000000010664(MiAaPQ)EBC4826407(EXLCZ)99433000000001066420170404h20172017 uy 0engurcnu||||||||rdacontentrdamediardacarrierAtomic layer deposition in energy conversion applications /Julien BachmannWeinheim, Germany :Wiley-VCH,2017.©20171 online resource (311 pages) illustrations, graphs3-527-33912-4 Includes bibliographical references at the end of each chapters and index.Energy conversionAtomic layer depositionEnergy conversion.Atomic layer deposition.621.042Bachmann Julien1716257MiAaPQMiAaPQMiAaPQBOOK9910830993803321Atomic layer deposition in energy conversion applications4111475UNINA