02957nam 2200601 a 450 991083008360332120230725021523.01-118-61663-41-299-31420-11-118-61675-8(CKB)2560000000100565(EBL)1143611(OCoLC)830161686(SSID)ssj0000833445(PQKBManifestationID)11481046(PQKBTitleCode)TC0000833445(PQKBWorkID)10935851(PQKB)10652342(OCoLC)841297273(MiAaPQ)EBC1143611(EXLCZ)99256000000010056520101222d2011 uy 0engur|n|---|||||txtccrIntegration of ferroelectric and piezoelectric thin films[electronic resource] concepts and applications for microsystems /edited by Emmanuel DefaÿLondon ISTE ;Hoboken, N.J. Wiley20111 online resource (424 p.)ISTEDescription based upon print version of record.1-84821-239-9 Includes bibliographical references and index.Dielectric, piezoelectric, pyroelectric, and ferroelectric -- Thermodynamic study : a structuring approach -- Ferroelectric-paraelectric phase transition thermodynamic modelling -- Mechanical formalism -- Dielectric formalism -- Piezoelectric formalism -- Acoustic formalism -- Electrostrictive formalism -- Electric characterization -- Piezoelectric resonators and filters -- High overtone bulk acoustic resonator (HBAR) -- Electrostrictive resonators -- Thin film piezoelectric transducers.This book contains four parts. The first one is dedicated to concepts. It starts with the definitions and examples of what is piezo-pyro and ferroelectricity by considering the symmetry of the material. Thereafter, these properties are described within the framework of Thermodynamics. The second part described the way to integrate these materials in Microsystems. The third part is dedicated to characterization: composition, structure and a special focused on electrical behaviors. The last part gives a survey of state of the art applications using integrated piezo or/and ferroelectric films.ISTEPiezoelectric devicesMaterialsFerroelectric thin filmsMiniature electronic equipmentMaterialsPiezoelectric devicesMaterials.Ferroelectric thin films.Miniature electronic equipmentMaterials.621.3815621.38152Defaÿ Emmanuel863199MiAaPQMiAaPQMiAaPQBOOK9910830083603321Integration of ferroelectric and piezoelectric thin films4036328UNINA