02677nam 2200589Ia 450 991082427660332120200520144314.01-60783-978-4(CKB)2550000000012446(EBL)583647(OCoLC)659579814(SSID)ssj0000410915(PQKBManifestationID)11260756(PQKBTitleCode)TC0000410915(PQKBWorkID)10353699(PQKB)11213597(Au-PeEL)EBL583647(CaPaEBR)ebr10393281(CaBNVSL)mat09100728(IEEE)9100728(MiAaPQ)EBC583647(EXLCZ)99255000000001244620100317d2010 uy 0engurcn|||||||||txtccrFBAR, MEMS and NEMS resonator design and applications /Humberto Campanella1st ed.Boston Artech Housec20101 online resource (363 p.)Integrated microsystems seriesIncludes index.1-60783-977-6 Includes bibliographical references and index.1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin.Artech House integrated microsystems series.Acoustic surface wave devicesElectric resonatorsAcoustic surface wave devices.Electric resonators.621.381Campanella Humberto1645514MiAaPQMiAaPQMiAaPQBOOK9910824276603321FBAR, MEMS and NEMS resonator design and applications4202728UNINA