01259nam 2200433 450 991082274690332120230725030146.03-7369-3270-7(CKB)4340000000199192(MiAaPQ)EBC5021238(EXLCZ)99434000000019919220171006h20102010 uy 0gerurcnu||||||||rdacontentrdamediardacarrierAtomlagenabscheidung von hafniumoxid /Thomas Zilbauer1. Auflage.Göttingen, [Germany] :Cuvillier Verlag,2010.©20101 online resource (152 pages) illustrations (some color)3-86955-270-0 Includes bibliographical references.Chemical vapor depositionAtomic layer depositionHafnium oxideChemical vapor deposition.Atomic layer deposition.Hafnium oxide.660.04Zilbauer Thomas1678888MiAaPQMiAaPQMiAaPQBOOK9910822746903321Atomlagenabscheidung von hafniumoxid4046802UNINA