03560nam 22005892 450 991081494470332120151005020621.01-107-23329-11-139-62462-81-107-25359-41-139-03260-71-139-61532-71-139-61160-71-139-62090-8(CKB)3460000000129181(EBL)1099805(OCoLC)842885418(UkCbUP)CR9781139032605(MiAaPQ)EBC1099805(Au-PeEL)EBL1099805(CaPaEBR)ebr10695303(CaONFJC)MIL485881(PPN)261344609(EXLCZ)99346000000012918120110225d2013|||| uy| 0engur|||||||||||txtrdacontentcrdamediacrrdacarrierElectromechanics and MEMS /Thomas B. Jones, University of Rochester, New York, Nenad G. Nenadic, Rochester Institute of Technology[electronic resource]Cambridge :Cambridge University Press,2013.1 online resource (xx, 559 pages) digital, PDF file(s)Title from publisher's bibliographic system (viewed on 05 Oct 2015).0-521-76483-1 1-139-60974-2 Includes bibliographical references and index.Machine generated contents note: 1. Introduction; 2. Circuit-based modeling; 3. Capacitive lumped parameter electromechanics; 4. Small-signal capacitive electromechanical systems; 5. Electromechanics of piezoelectric elements; 6. Capacitive sensing and resonant drive circuits; 7. Distributed 1D and 2D electromechanical structures; 8. Practical MEMS: pressure transducers, accelerometers and gyroscopes; 9. Electromechanics of magnetic MEMS devices; A. Review of quasistatic electromagnetics; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication; D. A brief review of solid mechanics; E. Tables of M- and N-form transducer matrics; F. Finite element analysis as applied to MEMS.Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles.Electromechanics & MEMSMicroelectromechanical systemsMicroelectromechanical systems.621.381TEC008080bisacshJones T. B(Thomas Byron),1944-1706273Nenadic Nenad G.UkCbUPUkCbUPBOOK9910814944703321Electromechanics and MEMS4093572UNINA