02511nam 2200601Ia 450 991081268830332120200520144314.01-58053-872-X(CKB)1000000000340580(EBL)227696(OCoLC)63045717(SSID)ssj0000182731(PQKBManifestationID)11156115(PQKBTitleCode)TC0000182731(PQKBWorkID)10172303(PQKB)10548485(Au-PeEL)EBL227696(CaPaEBR)ebr10081913(OCoLC)57033175(CaBNVSL)mat09100712(IEEE)9100712(MiAaPQ)EBC227696(EXLCZ)99100000000034058020040825d2004 uy 0engur|n|---|||||txtccrIntroduction to microelectromechanical microwave systems /Hector J. de los Santos2nd ed.Boston Artech Housec20041 online resource (235 p.)Artech House MEMS and sensors libraryDescription based upon print version of record.1-58053-871-1 Includes bibliographical references and index.Introduction to Microelectromechanical Microwave Systems; Contents; Preface xi; Acknowledgments xxi; 1 Microelectromechanical Systems 1; 2 Fundamental MEMS Device Physics 25; 3 Fundamental MEMS Devices: The MEM Switch 59; 4 Fundamental MEMS Devices: The MEM Resonator 87; 5 Microwave MEMS Applications 121; 6 MEMS-Based Microwave Circuits and Systems 173; Glossary 209; About the Author 211; Index 213Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wireless applications. This practical book steers readers past the drawbacks and towards the benefits of integrating RF/microwave MEMS into communications equipment.Microelectromechanical systems series.Microwave devicesMicroelectromechanical systemsMicrowave devices.Microelectromechanical systems.621.381/3Santos Hector J. de los720916MiAaPQMiAaPQMiAaPQBOOK9910812688303321Introduction to microelectromechanical microwave systems3993831UNINA