02055nam 2200625 450 991081021680332120230807193103.01-119-08386-91-119-08388-51-119-08387-7(CKB)3710000000473927(EBL)4040971(SSID)ssj0001555674(PQKBManifestationID)16179927(PQKBTitleCode)TC0001555674(PQKBWorkID)13972554(PQKB)10423605(PQKBManifestationID)14157528(PQKBWorkID)13495789(PQKB)23127709(MiAaPQ)EBC4040971(DLC) 2015027730(Au-PeEL)EBL4040971(CaPaEBR)ebr11113985(CaONFJC)MIL831249(OCoLC)927509309(EXLCZ)99371000000047392720151109h20152015 uy 0engur|n|---|||||txtccrMaterials and failures in MEMS and NEMS /edited by Atul Tiwari and Baldev RajSalem, Massachusetts ;Hoboken, New Jersey :Scrivener Publishing :Wiley,2015.©20151 online resource (487 p.)Materials Degradation and Failures SeriesDescription based upon print version of record.1-119-08360-5 Includes bibliographical references at the end of each chapters and index.Microelectromechanical systemsDesign and constructionNanoelectromechanical systemsDesign and constructionMicroelectromechanical systemsDesign and construction.Nanoelectromechanical systemsDesign and construction.621.381Tiwari AtulRaj Baldev1947-MiAaPQMiAaPQMiAaPQBOOK9910810216803321Materials and failures in MEMS and NEMS4004573UNINA