02900nam 2200577 a 450 991080883350332120230725031517.01-283-14355-09786613143556981-283-668-3(CKB)2670000000095724(EBL)731284(OCoLC)738433338(SSID)ssj0000640860(PQKBManifestationID)12291473(PQKBTitleCode)TC0000640860(PQKBWorkID)10621954(PQKB)10224664(MiAaPQ)EBC731284(WSP)00007094(Au-PeEL)EBL731284(CaPaEBR)ebr10480049(CaONFJC)MIL314355(EXLCZ)99267000000009572420110712d2011 uy 0engur|n|---|||||txtccrScanning electron microscope optics and spectrometers[electronic resource] /Anjam KhursheedSingapore ;Hackensack, N.J. World Scientific Pub. Co.20111 online resource (400 p.)Description based upon print version of record.981-283-667-5 Includes bibliographical references and index.Dedication; Preface; Contents; Chapter 1 Conventional SEM Design; Chapter 2 Spectrometer Design Principles; Chapter 3 In-lens Improvements; Chapter 4 Sub-nanometer Probe Diameters; Chapter 5 Secondary Electron Spectrometers; Chapter 6 Full Range Deflector Spectrometer Designs; Chapter 7 Full Range Parallel Energy Spectrometer Designs; Chapter 8 Spectroscopic SEM proposals; Appendix 1.0 Field Expansions; Appendix 1.1 Derivation of the Paraxial Equation; Appendix 1.2 Spherical Aberration; Appendix 1.3 Chromatic Aberration; Appendix 2 Multipole Lenses; Bibliography; IndexThis book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself. The book is aimed at scientists, engiScanning electron microscopesOptical spectrometersScanning electron microscopes.Optical spectrometers.681.413Khursheed Anjam28240MiAaPQMiAaPQMiAaPQBOOK9910808833503321Scanning electron microscope optics and spectrometers4051390UNINA