01551nam 2200517 450 991080616890332120200520144314.0(CKB)3340000000002982(Au-PeEL)EBL2046423(CaPaEBR)ebr11053062(CaONFJC)MIL271176(OCoLC)909142789(MiAaPQ)EBC2046423(PPN)198680236(EXLCZ)99334000000000298220151126h20152015 uy 0engurcnu||||||||rdacontentrdamediardacarrierMicromanufacturing engineering and technology /Yi QinSecond edition.Amsterdam, [Netherlands] :William Andrew,2015.©20151 online resource (859 pages) illustrations, tablesMicro & Nano Technologies0-323-31149-0 0-323-31267-5 Includes bibliographical references at the end of each chapters and index.Micro & nano technologies.Production engineeringManufacturing processesMicrotechnologyProduction engineering.Manufacturing processes.Microtechnology.658.5Qin Yi1651558MiAaPQMiAaPQMiAaPQBOOK9910806168903321Micromanufacturing engineering and technology4038320UNINA