01292nam0 22003133i 450 CAG147779120231121125421.0978888942150520170612d2007 ||||0itac50 baitaitz01i xxxe z01n˜I œsilenzi di JoeFabio Della Setadisegni di Irio Ottavio FantiniRomaPortaparole200761 p.ill.20 cm.˜I œventicinque21001UBO31401972001 ˜I œventicinque21702 1Sibilio, ElisabettaCFIV147436651Della Seta, FabioCFIV0147370701440459Fantini, Irio OttavioRMLV048448ITIT-0120170612IT-RM0166 IT-FR0017 Biblioteca Nazionale dell’Ebraismo Italiano “Tullia Zevi”RM0166 Biblioteca umanistica Giorgio ApreaFR0017 NCAG1477791Biblioteca umanistica Giorgio Aprea 52MAG 15/255 52SBA0000235875 VMN RS A 2018030120180301 52MAG 15/255* 52SBA0000235885 VMN RS A 2018030120180301 28 52Silenzi di Joe3604298UNICAS02567nam 2200625Ia 450 991079757090332120200520144314.00-8155-1988-597866125411480-08-094772-71-282-54114-5(CKB)3710000000469719(EBL)534865(OCoLC)667288128(SSID)ssj0000419278(PQKBManifestationID)11251997(PQKBTitleCode)TC0000419278(PQKBWorkID)10384015(PQKB)11690322(Au-PeEL)EBL534865(CaPaEBR)ebr10378866(CaSebORM)9780815515944(MiAaPQ)EBC534865(EXLCZ)99371000000046971920090710d2010 uy 0engur|n|---|||||txtccrHandbook of silicon based MEMS materials and technologies[electronic resource] /Veikko Lindroos ... [et al.]1st ed.Amsterdam ;Boston William Andrew/Elsevier20101 online resource (669 p.)Micro & nano technologiesDescription based upon print version of record.0-8155-1594-4 Includes bibliographical references and index.A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS materialMaterial properties and measurement techniquesAnalytical methods used in materials characterizationModeling in MEMSMeasuring MEMSMicromachining technologies in MEMSEncapsulation of MEMS componentsEmerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as wellMicro & nano technologies.Microelectromechanical systemsMicroelectromechanical systemsMaterialsSiliconElectric propertiesMicroelectromechanical systems.Microelectromechanical systemsMaterials.SiliconElectric properties.621.38152Lindroos Veikko1543336MiAaPQMiAaPQMiAaPQBOOK9910797570903321Handbook of silicon based MEMS materials and technologies3796711UNINA