02898nam 2200577 a 450 991078610920332120230803025726.03-527-67503-5(CKB)2670000000342930(EBL)1161984(OCoLC)836403150(SSID)ssj0001192835(PQKBManifestationID)11684653(PQKBTitleCode)TC0001192835(PQKBWorkID)11227475(PQKB)10371421(MiAaPQ)EBC481344(Au-PeEL)EBL481344(CaPaEBR)ebr10682369(CaONFJC)MIL194693(OCoLC)264717029(EXLCZ)99267000000034293020130410d2013 uy 0engur|n|---|||||txtccrReliability of MEMS[electronic resource] testing of materials and devices /edited by Osamu Tabata, Toshiyuki Tsuchiya2nd ed.Weinheim Wiley-VCH20131 online resource (325 p.)Advanced micro & nanosystemsFirst edition 2007.3-527-33501-3 Includes bibliographical references and index.Title Page; Preface; Foreword; Contents; List of Contributors; Overview; 1 Evaluation of Mechanical Properties of MEMS Materials and Their Standardization; 2 Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating - Substrate Systems; 3 Thin film Characterization Using the Bulge Test; 4 Uniaxial Tensile Test for MEMS Materials; 5 On chip Testing of MEMS; 6 Reliability of a Capacitive Pressure Sensor; 7 Inertial Sensors; 8 High accuracy, High reliability MEMS Accelerometer; 9 Reliability of MEMS Variable Optical Attenuator; 10 Eco Scan MEMS Resonant Mirror; IndexNow available in softcover, this book closely examines the enabling technologies for the fabrication of micro- and nanodevices. Divided into two clearly structured sections, the first begins with an insider's view of industrial MEMS commercialization, followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, as well as the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles theAdvanced micro & nanosystems.Microelectromechanical systemsReliabilityMicroelectromechanical systemsReliability.539.60113Tabata Osamu892953Tsuchiya Toshiyuki917771MiAaPQMiAaPQMiAaPQBOOK9910786109203321Reliability of MEMS2057813UNINA