02788oam 2200661I 450 991078590330332120230725035007.00-429-08792-61-61583-947-X90-04-19095-310.1201/b12181 (CKB)2670000000311395(EBL)1109848(OCoLC)827211774(SSID)ssj0000595843(PQKBManifestationID)11392923(PQKBTitleCode)TC0000595843(PQKBWorkID)10575121(PQKB)10410158(MiAaPQ)EBC1109848(Au-PeEL)EBL1109848(CaPaEBR)ebr10644872(CaONFJC)MIL501668(OCoLC)713869534(EXLCZ)99267000000031139520180331d2010 uy 0engur|n|---|||||txtccrAdhesion aspects in MEMS-NEMS /edited by S. H. Kim, M. T. Dugger and K. L. MittalLeiden ;Boston :Brill ;Biggleswade :Extenza Turpin [distributor],2010.1 online resource (424 p.)Description based upon print version of record.90-04-19094-5 Includes bibliographical references.pt. 1. Understanding through continuum theory -- pt. 2. Computer simulation of interfaces -- pt. 3. Adhesion and friction measurements -- pt. 4. Adhesion in practical applications -- pt. 5. Adhesion mitigation strategies.Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surfaceMicroelectromechanical systemsNanoelectromechanical systemsAdhesionSurfaces (Technology)Microelectromechanical systems.Nanoelectromechanical systems.Adhesion.Surfaces (Technology)621.381Kim Seong H1500254Dugger Michael T1500255Mittal K. L.1945-748276MiAaPQMiAaPQMiAaPQBOOK9910785903303321Adhesion aspects in MEMS-NEMS3726843UNINA