05660nam 2200709 450 991078572480332120230725034603.01-62198-685-33-03813-609-3(CKB)2670000000257034(EBL)1872609(SSID)ssj0000787351(PQKBManifestationID)11466603(PQKBTitleCode)TC0000787351(PQKBWorkID)10813674(PQKB)10904258(Au-PeEL)EBL1872609(CaPaEBR)ebr10817952(OCoLC)875216560(MiAaPQ)EBC1872609(EXLCZ)99267000000025703420110726h20112011 uy| 0engur|n|---|||||txtccrNEMS/MEMS technology and devices selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore /edited by Lynn Khine and Julius M. TsaiDurnten-Zurich, Switzerland :Trans Tech Publications,[2011]©20111 online resource (233 p.)Advanced materials research,1022-6680 ;volume 254Description based upon print version of record.3-03785-145-7 Includes bibliographical references and indexes.NEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir ForceA Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS ApplicationsA Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and MeasurementFocused Ion Beam Fabricated Polystyrene-Platinum Thermal MicroactuatorLead-Free BSZT/Epoxy 1-3 Composites for Ultrasonic Transducer Applications; Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants; Tagging for Capsule Endoscopy Localization; The Negative π/2 Phase Shift of Total Reflect Light; High Topography Polyimide CMP Process; Hydridosilane Modification of Metals: An Exploratory Study; Multi Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical RotorArea-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic ResonatorsDevelopment of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried OxideThe emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applicatiAdvanced materials research ;v. 254.Nanoelectromechanical systemsCongressesMicroelectromechanical systemsCongressesNEMS/MEMS technologyMaterialsAdvanced technologiesICMATNanoelectromechanical systemsMicroelectromechanical systems233Khine Lynn1529703Tsai Julius M1529704International Conference on Materials for Advanced TechnologiesMiAaPQMiAaPQMiAaPQBOOK9910785724803321NEMS3774130UNINA