02646nam 2200625 450 991078413550332120230125193525.01-58053-872-X(CKB)1000000000340580(EBL)227696(OCoLC)63045717(SSID)ssj0000182731(PQKBManifestationID)11156115(PQKBTitleCode)TC0000182731(PQKBWorkID)10172303(PQKB)10548485(Au-PeEL)EBL227696(CaPaEBR)ebr10081913(OCoLC)57033175(CaBNVSL)mat09100712(IEEE)9100712(MiAaPQ)EBC227696(EXLCZ)99100000000034058020200729d2004 uy engur|n|---|||||txtccrIntroduction to microelectromechanical microwave systems /Héctor J. de los Santos2nd ed.Boston :Artech House,©2004.[Piscataqay, New Jersey] :IEEE Xplore,[2004]1 online resource (235 p.)Artech House MEMS and sensors libraryDescription based upon print version of record.1-58053-871-1 Includes bibliographical references and index.Introduction to Microelectromechanical Microwave Systems; Contents; Preface xi; Acknowledgments xxi; 1 Microelectromechanical Systems 1; 2 Fundamental MEMS Device Physics 25; 3 Fundamental MEMS Devices: The MEM Switch 59; 4 Fundamental MEMS Devices: The MEM Resonator 87; 5 Microwave MEMS Applications 121; 6 MEMS-Based Microwave Circuits and Systems 173; Glossary 209; About the Author 211; Index 213Annotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wireless applications. This practical book steers readers past the drawbacks and towards the benefits of integrating RF/microwave MEMS into communications equipment.Artech House MEMS and sensors library.Microelectromechanical systems series.Microwave devicesMicroelectromechanical systemsMicrowave devices.Microelectromechanical systems.621.381/3Santos Héctor J. de los720916CaBNVSLCaBNVSLCaBNVSLBOOK9910784135503321Introduction to microelectromechanical microwave systems3770362UNINA