02178nam 2200601 450 991078346420332120230125203210.01-58053-873-8(CKB)1000000000210007(EBL)231651(OCoLC)70733931(SSID)ssj0000201171(PQKBManifestationID)11190123(PQKBTitleCode)TC0000201171(PQKBWorkID)10231402(PQKB)11206711(Au-PeEL)EBL231651(CaPaEBR)ebr10081990(OCoLC)55895606(CaBNVSL)mat09100080(IEEE)9100080(MiAaPQ)EBC231651(EXLCZ)99100000000021000720200729d2004 uy engur|n|---|||||txtccrMEMS mechanical sensors /Stephen Beeby [and others]Boston :Artech House,©2004.[Piscataqay, New Jersey] :IEEE Xplore,[2004]1 online resource (280 p.)Artech House microelectromechanical systems (MEMS) seriesDescription based upon print version of record.1-58053-536-4 Includes bibliographical references and index.Machine generated contents note: Ch. 1 Introduction -- Ch. 2 Materials and fabrication techniques -- Ch. 3 MEMS simulation and design tools -- Ch. 4 Mechanical sensor packaging -- Ch. 5AnnotationEngineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.Microelectromechanical systems series.Microelectromechanical systemsDetectorsMicroelectromechanical systems.Detectors.681/.2Beeby Stephen1475032CaBNVSLCaBNVSLCaBNVSLBOOK9910783464203321MEMS mechanical sensors3689017UNINA