03500nam 2200613 a 450 991078103720332120200520144314.01-84995-347-31-5231-0135-01-84995-014-8(CKB)2550000000012282(EBL)3417287(SSID)ssj0000828885(PQKBManifestationID)12355689(PQKBTitleCode)TC0000828885(PQKBWorkID)10843538(PQKB)11359871(MiAaPQ)EBC3417287(Au-PeEL)EBL3417287(CaPaEBR)ebr10698314(CaONFJC)MIL876141(OCoLC)843860785(PPN)220199752(EXLCZ)99255000000001228220130524d2009 uy 0engur|n|---|||||txtccrCeramics processing in microtechnology[electronic resource] /edited by H.-J. Ritzhaupt-Kleissl, Per JohanderDunbeath, Scotland Whittles Pub. ;Boca Raton, Fla. CRC Press20091 online resource (352 p.)Description based upon print version of record.1-904445-84-5 Includes bibliographical references and index.""Contents""; ""Foreword""; ""Preface""; ""The Ceramic Division within the 4M Network""; ""Abbreviations""; ""List of contributing authors� affiliations""; ""Ceramics in microtechnology: status, requirements and challenges""; ""Design rules for microcomponents""; ""Process simulation with particle methods: micropowder injection moulding and hot embossing""; ""Finite element modeling of the pressing of ceramic powders to predict the shape of a pellet after die compaction and sintering""; ""Wet chemical synthesis for multinary oxide ceramics""""Synthesis of nanoscaled powders for applications in microsystems technology""""Near net shaping of ceramics in microsystems technology""; ""(Ba/Sr)TiO3: A perovskite-type ferroelectric for tunable dielectric applications at radio frequencies""; ""Properties and application of polymer�ceramic� composites in microsystem technologies""; ""Micromoulds for injection moulding with ceramic feedstocks""; ""High-pressure microceramic injection moulding""; ""Low-pressure injection moulding""; ""Fabrication of ceramic microcomponents by electrophoretic deposition""""Tape casting in micro- and nanofabrication""""Low temperature cofi red ceramic-processing for microsystem applications""; ""Different ceramic materials for micromilling of high aspect ratio microstructures""; ""High precision microgrooving on ceramic substrates""; ""Patterning of ceramics and glass surfaces""; ""Free form microprocessing of ceramic materials by electrodischarge machining""; ""Layer manufacturing of ceramic microcomponents""; ""Micro direct writing of ceramics""; ""Quality assurance and metrology""; ""Index""MicromechanicsCeramic materialsMicrostructureMicrotechnologyMicromechanics.Ceramic materialsMicrostructure.Microtechnology.Ritzhaupt-Kleissl H.-J1516599Johander Per1516600MiAaPQMiAaPQMiAaPQBOOK9910781037203321Ceramics processing in microtechnology3753174UNINA