02823nam 2200601 450 991078103360332120230125224246.01-60783-978-4(CKB)2550000000012446(EBL)583647(OCoLC)659579814(SSID)ssj0000410915(PQKBManifestationID)11260756(PQKBTitleCode)TC0000410915(PQKBWorkID)10353699(PQKB)11213597(Au-PeEL)EBL583647(CaPaEBR)ebr10393281(CaBNVSL)mat09100728(IEEE)9100728(MiAaPQ)EBC583647(EXLCZ)99255000000001244620200729d2010 uy engurcn|||||||||txtccrAcoustic wave and electromechanical resonators concept to key applications /Humberto CampanellaNorwood, Massachusetts. :Artech House,©2010.[Piscataqay, New Jersey] :IEEE Xplore,[2010]1 online resource (363 p.)Integrated microsystems seriesIncludes index.1-60783-977-6 Includes bibliographical references and index.1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin.Artech House integrated microsystems series.Acoustic wave & electromechanical resonatorsAcoustic surface wave devicesElectric resonatorsAcoustic surface wave devices.Electric resonators.621.381Campanella Humberto1516580CaBNVSLCaBNVSLCaBNVSLBOOK9910781033603321Acoustic wave and electromechanical resonators3753142UNINA