01877nam 2200553 a 450 991077850790332120230331004940.01-280-20336-697866102033690-309-58375-60-585-08463-7(CKB)110986584751116(OCoLC)43475627(CaPaEBR)ebrary10055392(SSID)ssj0000222460(PQKBManifestationID)11175776(PQKBTitleCode)TC0000222460(PQKBWorkID)10169814(PQKB)11765997(MiAaPQ)EBC3376299(Au-PeEL)EBL3376299(CaPaEBR)ebr10055392(OCoLC)923262698(EXLCZ)9911098658475111619911004d1991 uy 0engurcn|||||||||txtccrPlasma processing of materials[electronic resource] scientific opportunities and technological challenges /Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research CouncilWashington, D.C. National Academy Press19911 online resource (87 p.) Bibliographic Level Mode of Issuance: Monograph0-309-04597-5 Plasma engineeringMicroelectronicsMaterialsEffect of radiation onSurfaces (Technology)Plasma engineering.MicroelectronicsMaterialsEffect of radiation on.Surfaces (Technology)621.044MiAaPQMiAaPQMiAaPQBOOK9910778507903321Plasma processing of materials3805764UNINA