01480nam 2200445 450 991074321970332120220925015425.0981-16-9442-7981-16-9443-5981-16-9443-5(MiAaPQ)EBC6884900(Au-PeEL)EBL6884900(CKB)21078949600041(PPN)260826340(EXLCZ)992107894960004120220925d2022 uy 0engurcnu||||||||txtrdacontentcrdamediacrrdacarrierMicromachined circuits and devices microwave to sub-millimeter applications /Shiban Kishen Koul and Sukomal DeySingapore :Springer,[2022]©20221 online resource (386 pages)Lecture Notes in Electrical Engineering ;Volume 859Print version: Koul, Shiban Kishen Micromachined Circuits and Devices Singapore : Springer Singapore Pte. Limited,c2022 9789811694424 Lecture notes in electrical engineering ;Volume 859.Microelectromechanical systemsMicroelectromechanical systems.621.381Koul Shiban K.726856Dey SukomalMiAaPQMiAaPQMiAaPQBOOK9910743219703321Micromachined circuits and devices3560241UNINA