03451nam 22006375 450 991074119730332120230814094059.0981-19-8975-310.1007/978-981-19-8975-9(MiAaPQ)EBC30697459(Au-PeEL)EBL30697459(DE-He213)978-981-19-8975-9(PPN)272269360(CKB)27982362300041(EXLCZ)992798236230004120230814d2023 u| 0engurcnu||||||||txtrdacontentcrdamediacrrdacarrierFundamental Research on Nanomanufacturing /edited by Bingheng Lu1st ed. 2023.Singapore :Springer Nature Singapore :Imprint: Springer,2023.1 online resource (140 pages)Reports of China’s Basic Research,2731-8915Print version: Lu, Bingheng Fundamental Research on Nanomanufacturing Singapore : Springer,c2023 9789811989742 Includes bibliographical references and index.Project Overview -- Research Situation -- Nano/Sub-Nanometer Precision Manufacturing -- Consistent Manufacturing of Macro,Micro and Nano Cross-Scale Structures -- Cross-Scale Integrated Manufacturing of Nanostructures and Devices -- New Methods of Laser Micro-Nanomanufacturing -- Other Nanomanufacturing Principles and Technological Breakthroughs -- Outlook.This book explores new principles and methods of nanomanufacturing based on physical/chemical effects through interdisciplinary research and reveals surface/interface effects and scale effects in processing, forming, modification, and cross-scale manufacturing at nanoscale and nanoscale precision. It is a summary of a major research project in the field of engineering and materials science of China, the “Fundamental Research of Nanomanufacturing”. It clarifies the evolution mechanism of material structure, establishes the accurate characterization and measurement method of nanomanufacturing process, develops some original nanomanufacturing processes and equipment, and provides theoretical basis for realizing the consistent batch process of nanomanufacturing. It reports a series of research breakthroughs in principles and methods of nano-precision manufacturing, nanoscale structure fabrication as well as efficient and multiscale fabrication of large area nanostructures.Reports of China’s Basic Research,2731-8915NanotechnologyIndustrial engineeringProduction engineeringNanoelectromechanical systemsNanoengineeringIndustrial and Production EngineeringNanoscale DevicesNanoscale Design, Synthesis and ProcessingNanotechnology.Industrial engineering.Production engineering.Nanoelectromechanical systems.Nanoengineering.Industrial and Production Engineering.Nanoscale Devices.Nanoscale Design, Synthesis and Processing.620.5Lu BinghengMiAaPQMiAaPQMiAaPQBOOK9910741197303321Fundamental Research on Nanomanufacturing3553014UNINA