01364aam 2200421I 450 991071415400332120151030113006.0GOVPUB-C13-8fea6bac2f52d56fa8b77a4188f65e3c(CKB)2550000001329210(OCoLC)927169563(EXLCZ)99255000000132921020151030d1987 ua 0engrdacontentrdamediardacarrierSilicon-on-insulator /A. Baghdadi, E. J. WaltersGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1987.1 online resourceNBS special publication ;400-801987.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.0-08-101526-7 1-306-94913-0 Includes bibliographical references.Silicon-On-Insulator Baghdadi A1390297Baghdadi A1390297Walters E. Jane1390287United States.National Bureau of Standards.NBSNBSGPOBOOK9910714154003321Silicon-on-insulator3451915UNINA