01430aam 2200373I 450 991071139160332120160205080659.0GOVPUB-C13-eab0691f2aa23376e843180bfb2bc67e(CKB)5470000002482111(OCoLC)936670819(EXLCZ)99547000000248211120160205d1969 ua 0engrdacontentrdamediardacarrierMethods of measurement for semiconductor materials, process control, and devices, quarterly report, January 1 to March 31, 1969. /W. Murray BullisGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1969.1 online resourceNBS technical note ;4881969.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Bullis W. Murray1387657Bullis W. Murray1387657United States.National Bureau of Standards.NBSNBSGPOBOOK9910711391603321Methods of measurement for semiconductor materials, process control, and devices, quarterly report, January 1 to March 31, 19693486643UNINA