01480aam 2200385I 450 991071138920332120160205080659.0GOVPUB-C13-5511943c6a8ae3a086b009b2864e60aa(CKB)5470000002482135(OCoLC)936670892(EXLCZ)99547000000248213520160205d1971 ua 0engrdacontentrdamediardacarrierMethods of measurement for semiconductor materials, process control, and devices quarterly report January 1 to March 31, 1971 /W. Murray BullisGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1971.1 online resourceNBS technical note ;5981971.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Methods of measurement for semiconductor materials, process control, and devices Bullis W. Murray1387657Bullis W. Murray1387657United States.National Bureau of Standards.NBSNBSGPOBOOK9910711389203321Methods of measurement for semiconductor materials, process control, and devices3437721UNINA