01517aam 2200385I 450 991071138830332120160205080659.0GOVPUB-C13-7dfaa6b3130b75dc56166bfa3c989646(CKB)5470000002482145(OCoLC)936670981(EXLCZ)99547000000248214520160205d1973 ua 0engrdacontentrdamediardacarrierMethods of measurement for semiconductor materials, process control, and devices quarterly report October 1 to December 31, 1972 /W. Murray BullisGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1973.1 online resourceNBS technical note ;7731973.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Methods of measurement for semiconductor materials, process control, and devices quarterly report Bullis W. Murray1387657Bullis W. Murray1387657United States.National Bureau of Standards.NBSNBSGPOBOOK9910711388303321Methods of measurement for semiconductor materials, process control, and devices quarterly report3459274UNINA