01482aam 2200421I 450 991071120700332120151113033705.0GOVPUB-C13-0b5eed4345f3f80263c59f745110e9d6(CKB)5470000002481956(OCoLC)929067615(EXLCZ)99547000000248195620151113d1998 ua 0engrdacontentrdamediardacarrierCalibration service for laser power and energy at 248 nm /Rodney W. LeonhardtGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1998.1 online resourceNIST technical note ;13941998.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Excimer lasersCalibrationLasersIndustrial applicationsExcimer lasersCalibration.LasersIndustrial applications.Leonhardt Rodney W1414514Leonhardt Rodney W1414514United States.National Bureau of Standards.NBSNBSGPOBOOK9910711207003321Calibration service for laser power and energy at 248 nm3513970UNINA