01286aam 2200373I 450 991071119190332120151030113009.0GOVPUB-C13-abd9d289cc7e0875113fda481f20fea5(CKB)5470000002480088(OCoLC)927169867(EXLCZ)99547000000248008820151030d1993 ua 0engrdacontentrdamediardacarrierEvolution of silicon materials characterization /W. Murray BullisGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1993.1 online resourceNIST special publication ;400-921993.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Bullis W. Murray1387657Bullis W. Murray1387657National Institute of Standards and Technology (U.S.)NBSNBSGPOBOOK9910711191903321Evolution of silicon materials characterization3533055UNINA