01537aam 2200397I 450 991071119130332120151030113009.0GOVPUB-C13-a7a79a01e42cf22ce5ff8c63bd719f09(CKB)5470000002480094(OCoLC)927169878(EXLCZ)99547000000248009420151030d1995 ua 0engrdacontentrdamediardacarrierSurvey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry /W. Murray Bullis, S. Perkowitz, D. G. SeilerGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1995.1 online resourceNIST special publication ;400-981995.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Bullis W. Murray1387657Bullis W. Murray1387657Perkowitz Sidney727343Seiler David G53724National Institute of Standards and Technology (U.S.)NBSNBSGPOBOOK9910711191303321Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry3453180UNINA