01341aam 2200385I 450 991071119110332120151030113009.0GOVPUB-C13-973a127f89f8fa375dc7a1b95a014e73(CKB)5470000002480096(OCoLC)927169880(EXLCZ)99547000000248009620151030d1998 ua 0engrdacontentrdamediardacarrierThin film reference materials development /Barbara J. Belzer, David L. BlackburnGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1998.1 online resourceNIST special publication ;400-1001998.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Belzer Barbara J1410394Belzer Barbara J1410394Blackburn David L1410395National Institute of Standards and Technology (U.S.)NBSNBSGPOBOOK9910711191103321Thin film reference materials development3498976UNINA