03350aam 2200517I 450 991071116730332120160926090654.0GOVPUB-C13-e897d58723c4156c3001abd157d0ffa5(CKB)5470000002480336(OCoLC)958885885(EXLCZ)99547000000248033620160921d2016 ua 0engrdacontentrdamediardacarrierMethod for measuring the diameter of polystyrene latex reference spheres by atomic force microscopy /John A. Dagata; Natalia Farkas; Prem Kavuri; Andras E. Vladar; Chung-Lin Wu; Hiroshi Itoh; Kensei EharaGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,2016.1 online resource (33 pages) illustrations (color)NIST special publication ;260-185Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.July 2016.Title from PDF title page (viewed July 28, 2016).Includes bibliographical references.This report presents a correlated height and width measurement model for particle size analysis of spherical particles by atomic force microscopy (AFM). It is complementary to more familiar methods based on a single value of the particle height or on a line average obtained from a close-packed particle array. Significant influence quantities affecting the determination of average particle size and its uncertainty are considered for the important case of polystyrene latex (PSL) reference materials. Particlesubstrate deformation, resulting from adhesive contact between particle and substrate during sample preparation, is estimated as a function of particle size. Post-processing of AFM datasets is explored as a means of eliminating bias due to non-steady state measurement conditions. These biases arise from variable particle-tip interaction caused by drift of instrumental parameters from their optimal settings during long acquisition times and inevitable wear of the AFM probe. Changes of the initial probe shape are established using a Si/SiO2 multilayer tip characterizer and are updated periodically during the analysis of sequential data sets for combinations of several particles sizes and different probes. Finally, the capability of this procedure to serve as a statistical error-correction scheme in AFM particle-size metrology is assessed.Atomic force microscopyPolystyreneAtomic force microscopy.Polystyrene.Dagata John A1389048Dagata John A1389048Ehara Kensei1389049Farkas Natalia1389050Itoh Hiroshi1389051Kavuri Prem1389052Vladár András E1389053Wu Zhonglin1389054Physical Measurement Laboratory (National Institute of Standards and Technology (U.S.))NBSNBSGPONBSBOOK9910711167303321Method for measuring the diameter of polystyrene latex reference spheres by atomic force microscopy3440167UNINA