01402aam 2200397I 450 991071077300332120240802001147.0GOVPUB-C13-8531b31d5e7ea8f57e9e5dad1a782e3e(CKB)5470000002478575(OCoLC)947047636(EXLCZ)99547000000247857520160421d2005 ua 0engrdacontentrdamediardacarrierMaterials Science and Engineering Laboratory Nanometrology FY 2004/2005 projects /Clare Allocca; Stephen FreimanGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,2005.1 online resourceNISTIR ;71302005.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Materials Science and Engineering LaboratoryAllocca Clare1410676Allocca Clare1410676Freiman S. W861320National Institute of Standards and Technology (U.S.)NBSNBSGPOBOOK9910710773003321Materials Science and Engineering Laboratory4190353UNINA