01310aam 2200373I 450 991071056660332120160426110502.0GOVPUB-C13-cf6ba60967ec192bf765e2c52104e975(CKB)5470000002477629(OCoLC)947844119(EXLCZ)99547000000247762920160426d1985 ua 0engrdacontentrdamediardacarrierUltraclean semiconductor processing laboratory safe operating procedures manual /G. P. CarverGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1985.1 online resourceNBSIR ;85-31491985.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Carver G. P1385516Carver G. P1385516United States.National Bureau of Standards.NBSNBSGPOBOOK9910710566603321Ultraclean semiconductor processing laboratory safe operating procedures manual3438603UNINA02033nas# 22003853i 450 VAN010647720240326120444.73201095920320161006a1880 |0itac50 baengUS|||| |||||aW|||||||||i e bScienceWashingtonAmerican Association for the Advancement of Science1880-volumi26 cm001VAN00277062001 ScienceAmerican Association for the Advancement of Science210 WashingtonAmerican Association for the Advancement of Science1880-215 volumi.ill.28 cm300 SettimanaleWashingtonVANL000038American association for the advancement of science <editore>VANV109564650ITSOL20240329RICAhttps://www.jstor.org/journal/sciencehttps://www.jstor.org/journal/sciencehttps://www.science.org/loi/scienceE-journal – Accesso al full-text attraverso riconoscimento IP di Ateneo, proxy e/o ShibbolethBIBLIOTECA DEL DIPARTIMENTO DI PSICOLOGIAIT-CE0119VAN161880-2017; 1997-Jstor ; Science ;BIBLIOTECA DEL DIPARTIMENTO DI SCIENZE E TECNOLOGIE AMBIENTALI BIOLOGICHE E FARMACEUTICHEIT-CE0101VAN171997-PE DISTABIF 594 ;BIBLIOTECA CENTRO DI SERVIZIO SBAVAN152009-PE SBA 71 ;NVAN0106477BIBLIOTECA DEL DIPARTIMENTO DI PSICOLOGIA161880-2017;BIBLIOTECA DEL DIPARTIMENTO DI SCIENZE E TECNOLOGIE AMBIENTALI BIOLOGICHE E FARMACEUTICHE171997-17CONS PE DISTABIF 17PE 594 594 20231027 BIBLIOTECA CENTRO DI SERVIZIO SBA152009-15CONS PE SBA 71 15PE 71 20230612 BIBLIOTECA DEL DIPARTIMENTO DI PSICOLOGIA161997-Science56245UNICAMPANIA