01591aam 2200409I 450 991071053830332120160620103604.0GOVPUB-C13-a580a4c8f067ed3ba62fecc1983d09ed(CKB)5470000002477915(OCoLC)951907069(EXLCZ)99547000000247791520160620d1987 ua 0engrdacontentrdamediardacarrierRADC/NBS international workshop moisture measurement and control for microelectronics (IV) proceedings of the RADC/NBS workshop held at the National Bureau of Standards Gaithersburg, MD November 12-14, 1986 /Didier Kane; Benjamin A. Moore; W. Janes WaltersGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1987.1 online resourceNBSIR ;87-35881987.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.RADC/NBS international workshop moisture measurement and control for microelectronics Kane Didier1419153Kane Didier1419153Moore Benjamin A1404222Walters W. Janes1419154United States.National Bureau of Standards.NBSNBSGPOBOOK9910710538303321RADC3532752UNINA