02188aam 2200565I 450 991071052660332120251201184319.0GOVPUB-C13-ca35345bfea3d3aec3f3924a80a0e934(CKB)5470000002478033(OCoLC)958933663(EXLCZ)99547000000247803320160922d2002 ua 0engrdacontentrdamediardacarrierNanomanufacturing of atom-based dimensional standards a final project report of the national advanced manufacturing testbed /T.V. Vorburger; R.H. Allen; B. Damazo; J. Fu; D. Monk; M. Osti; J. Pellegrino; R. Rhorer; R. Russell; R. Silver; R. Sriram; K. Stouffer; D. A. Swyt; E. C. Teague; T. Wheatley; D. WilmeringGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,2002.1 online resourceNISTIR ;68502002.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Nanomanufacturing of atom-based dimensional standardsVorburger T. V(Theodore V.)1389846Allen R. H1401552Damazo B1401553Fu J1401554Monk D1401555Osti M1401556Pellegrino J1401557Rhorer R1401558Russell R421138Silver R1401559Sriram R1401560Stouffer K1401561Swyt D. A1401562Teague E. C(Edgar Clayton),1941-1399064Vorburger T. V(Theodore V.)1389846Wheatley T1401563Wilmering D1401564National Institute of Standards and Technology (U.S.)NBSNBSGPOBOOK9910710526603321Nanomanufacturing of atom-based dimensional standards4461620UNINA