02168aam 2200565I 450 991071052660332120160922100248.0GOVPUB-C13-ca35345bfea3d3aec3f3924a80a0e934(CKB)5470000002478033(OCoLC)958933663(EXLCZ)99547000000247803320160922d2002 ua 0engrdacontentrdamediardacarrierNanomanufacturing of atom-based dimensional standards a final project report of the national advanced manufacturing testbed /T.V. Vorburger; R.H. Allen; B. Damazo; J. Fu; D. Monk; M. Osti; J. Pellegrino; R. Rhorer; R. Russell; R. Silver; R. Sriram; K. Stouffer; D. A. Swyt; E. C. Teague; T. Wheatley; D. WilmeringGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,2002.1 online resourceNISTIR ;68502002.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Nanomanufacturing of atom-based dimensional standards Vorburger T. V(Theodore V.)1389846Allen R. H1401552Damazo B1401553Fu J1401554Monk D1401555Osti M1401556Pellegrino J1401557Rhorer R1401558Russell R421138Silver R1401559Sriram R1401560Stouffer K1401561Swyt D. A1401562Teague E. C1389851Vorburger T. V(Theodore V.)1389846Wheatley T1401563Wilmering D1401564National Institute of Standards and Technology (U.S.)NBSNBSGPOBOOK9910710526603321Nanomanufacturing of atom-based dimensional standards3470356UNINA