01672aam 2200445I 450 991071051920332120130716040755.0GOVPUB-C13-eb3eb13243d6a34414f4dab2e6da389a(CKB)5470000002478108(OCoLC)852900099(EXLCZ)99547000000247810820130716d2013 ua 0engrdacontentrdamediardacarrierMethod for measuring axis orthogonality in MEMS accelerometers /Craig D. McGray; Yaqub Afridi; Jon GeistGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,2013.1 online resource (11 pages) illustrations (some color)NISTIR ;7925"July 2013."Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page (viewed July 16, 2013).Includes bibliographical references.AccelerometersAxis orthogonalityAccelerometers.Axis orthogonality.McGray Craig D1394935Afridi Yaqub1394936Geist Jon1392974McGray Craig D1394935National Institute of Standards and Technology (U.S.).Semiconductor and Dimensional Division, Physical Measurement Laboratory.NBSNBSGPOBOOK9910710519203321Method for measuring axis orthogonality in MEMS accelerometers3452794UNINA