01300aam 2200385I 450 991071029720332120151118015331.0GOVPUB-C13-5dab9c67d9b078d840bc33893977088a(CKB)5470000002476310(OCoLC)929883663(EXLCZ)99547000000247631020151118d1978 ua 0engrdacontentrdamediardacarrierSemiconductor technology program progress briefs /W. Murray BullisGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1978.1 online resourceNBSIR ;78-1444-31978.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Semiconductor technology program Bullis W. Murray1387657Bullis W. Murray1387657United States.National Bureau of Standards.NBSNBSGPOBOOK9910710297203321Semiconductor technology program3452709UNINA