01416aam 2200397I 450 991071025960332120160121100810.0GOVPUB-C13-bdb08ce613d5bda9810258fed2a79a16(CKB)5470000002476690(OCoLC)935500887(EXLCZ)99547000000247669020160121d1982 ua 0engrdacontentrdamediardacarrierA computer program for analysis of data from microelectronic test structures /R. L. Mattis; L. J. Till; R. C. FrischGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1982.1 online resourceNBSIR ;82-24921982.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Mattis Richard L1390315Frisch R. C1401448Mattis Richard L1390315Till L. J1401449United States.National Bureau of Standards.NBSNBSGPOBOOK9910710259603321A computer program for analysis of data from microelectronic test structures3470219UNINA