01300aam 2200385I 450 991071023980332120160309011335.0GOVPUB-C13-c1cea7aa00d3753545db10123af3b09c(CKB)5470000002476890(OCoLC)944187915(EXLCZ)99547000000247689020160309d1980 ua 0engrdacontentrdamediardacarrierSemiconductor technology program progress briefs /W. Murray BullisGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1980.1 online resourceNBSIR ;80-2006-21980.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Semiconductor technology program Bullis W. Murray1387657Bullis W. Murray1387657United States.National Bureau of Standards.NBSNBSGPOBOOK9910710239803321Semiconductor technology program3452709UNINA