01315aam 2200385I 450 991071023270332120160309011335.0GOVPUB-C13-78a48a3c30b960a2bb6e8a3f0aa7d932(CKB)5470000002476962(OCoLC)944188017(EXLCZ)99547000000247696220160309d1980 ua 0engrdacontentrdamediardacarrierThe NBS semiconductor technology program and VLSI /W. Murray Bullis; R. I. ScaceGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1980.1 online resourceNBSIR ;80-20571980.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Bullis W. Murray1387657Bullis W. Murray1387657Scace R. I1402673United States.National Bureau of Standards.NBSNBSGPOBOOK9910710232703321The NBS semiconductor technology program and VLSI3473637UNINA