01359aam 2200397I 450 991071022520332120160309011337.0GOVPUB-C13-84647b95c35d62872e19d496813f497a(CKB)5470000002477037(OCoLC)944188116(EXLCZ)99547000000247703720160309d1981 ua 0engrdacontentrdamediardacarrierMicroelectronic test patterns NBS-12 and NBS-24 /G. P. Carver; R. L. Mattis; M. G. BuehlerGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1981.1 online resourceNBSIR ;81-22341981.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Carver G. P1385516Buehler M. G1390314Carver G. P1385516Mattis Richard L1390315United States.National Bureau of Standards.NBSNBSGPOBOOK9910710225203321Microelectronic test patterns NBS-12 and NBS-243442929UNINA