01300aam 2200385I 450 991071022220332120160309011337.0GOVPUB-C13-fc6952fb04fa7b833e7c80857dda1dfd(CKB)5470000002477068(OCoLC)944188170(EXLCZ)99547000000247706820160309d1981 ua 0engrdacontentrdamediardacarrierSemiconductor technology program progress briefs /W. Murray BullisGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1981.1 online resourceNBSIR ;81-2230-21981.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Semiconductor technology program Bullis W. Murray1387657Bullis W. Murray1387657United States.National Bureau of Standards.NBSNBSGPOBOOK9910710222203321Semiconductor technology program3452709UNINA