01243aam 2200373I 450 991071021790332120160318082755.0GOVPUB-C13-294471c2bef333b136763fa9a94453aa(CKB)5470000002477111(OCoLC)945070608(EXLCZ)99547000000247711120160318d1982 ua 0engrdacontentrdamediardacarrierAnalysis of oxide and oxide/matrix interfaces in silicon nitride /Nancy J. TigheGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1982.1 online resourceNBSIR ;82-25741982.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Tighe N. J1387899Tighe N. J1387899United States.National Bureau of Standards.NBSNBSGPOBOOK9910710217903321Analysis of oxide and oxide3478478UNINA