01293aam 2200385I 450 991071021340332120160318082757.0GOVPUB-C13-ffcb243bd6597da24933ef11f58bb860(CKB)5470000002477157(OCoLC)945070759(EXLCZ)99547000000247715720160318d1983 ua 0engrdacontentrdamediardacarrierSemiconductor technology program progress briefs /E. J. WaltersGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1983.1 online resourceNBSIR ;82-26361983.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Semiconductor technology program Walters E. Jane1390287Walters E. Jane1390287United States.National Bureau of Standards.NBSNBSGPOBOOK9910710213403321Semiconductor technology program3536885UNINA