01355aam 2200397I 450 991071001150332120151118015329.0GOVPUB-C13-b00b921d9325acf9ab70e54db2f7e85e(CKB)5470000002476166(OCoLC)929883159(EXLCZ)99547000000247616620151118d1977 ua 0engrdacontentrdamediardacarrierApplication of proof tests to silicon nitride /N. J. Tighe; S. M. Wiederhorn; L. R. RussellGaithersburg, MD :U.S. Dept. of Commerce, National Institute of Standards and Technology,1977.1 online resourceNBSIR ;77-12021977.Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.Title from PDF title page.Includes bibliographical references.Tighe N. J1387899Russell L. R1408332Tighe N. J1387899Wiederhorn S. M1118568United States.National Bureau of Standards.NBSNBSGPOBOOK9910710011503321Application of proof tests to silicon nitride3491930UNINA